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Elsevier, Thin Solid Films, (469-470), p. 416-419

DOI: 10.1016/j.tsf.2004.06.178

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Aerosol-assisted chemical vapour deposition of sodium fluoride thin films

Journal article published in 2004 by Russell Binions, Claire J. Carmalt ORCID, Ivan P. Parkin ORCID
This paper is available in a repository.
This paper is available in a repository.

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Abstract

Thin films of sodium fluoride were created by the use of aerosol-assisted chemical vapour deposition between 200 and 600 °C on glass substrates. The films were found to be crystalline and single-phase (NaF) using X-ray diffraction. Scanning electron microscopy energy-dispersive analysis of X-rays gave coherent elemental compositions indicating that monophasic NaF was made with negligible impurity levels. The films appeared hazy and showed little optical transmission (5–10%) and reflectance (∼2%).