Published in
American Institute of Physics, Journal of Vacuum Science and Technology A, 6(33), p. 061303, 2015
DOI: 10.1116/1.4928033
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Fluid simulation of the bias effect in inductive/capacitive discharges
Journal article published in 2015 by
Yu-Ru Zhang,
Fei Gao,
Xue-Chun Li,
Annemie Bogaerts 
,
You-Nian Wang
,
You-Nian Wang
This paper is available in a repository.
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