Published in

IOP Publishing, Nanotechnology, 37(26), p. 375301, 2015

DOI: 10.1088/0957-4484/26/37/375301

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Universal pattern transfer methods for metal nanostructures by block copolymer lithography

This paper is made freely available by the publisher.
This paper is made freely available by the publisher.

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Abstract

A universal block copolymer pattern transfer method was demonstrated to produce Co nanostructures consisting of arrays of lines or dots from a polystyrene-block-polydimethylsiloxane (PS-b-PDMS) diblock copolymer. Three processes were used: liftoff, a damascene process, and ion beam etching using a hard mask of tungsten, including a sacrificial poly(methyl methacrylate) layer under the PS-b-PDMS for the etch and liftoff processes. The ion beam etch process produced the most uniform magnetic arrays. A structural and magnetic comparison in terms of uniformity, edge roughness and switching field distribution has been reported.