Published in

American Institute of Physics, Applied Physics Letters, 17(102), p. 173115

DOI: 10.1063/1.4804380

Links

Tools

Export citation

Search in Google Scholar

Determination of stress, strain, and elemental distribution within In(Ga)As quantum dots embedded in GaAs using advanced transmission electron microscopy

This paper is available in a repository.
This paper is available in a repository.

Full text: Download

Green circle
Preprint: archiving allowed
Green circle
Postprint: archiving allowed
Orange circle
Published version: archiving restricted
Data provided by SHERPA/RoMEO

Abstract

Non-truncated pyramidal In(Ga)As quantum dots (QDs) embedded in GaAs were obtained by a combination of low temperature/high rate GaAs covering of InAs QDs. We use advanced transmission electron microscopy to study the composition and mechanics of the objects. Results from the core region of a sliced QD, and from an entire object, are consistent and complementary allowing the development of accurate models describing the 3D shape, chemical distribution, elastic strains and stresses in the QD, wetting layer, and matrix. The measured structure develops an extremely compressive apex, reaching a vertical stress of �8 GPa and horizontal stress of �6.2 GPa.