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ECS Meeting Abstracts, 23(MA2013-01), p. 939-939, 2013

DOI: 10.1149/ma2013-01/23/939

The Electrochemical Society, ECS Transactions, 2(53), p. 17-27, 2013

DOI: 10.1149/05302.0017ecst

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Metal catalyzed porous N-type GaN layers: Low resistivity ohmic contacting and single-step MgO/GaN diode formation

This paper is made freely available by the publisher.
This paper is made freely available by the publisher.

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Abstract

Porous GaN crystals have been successfully grown and electrically contacted simultaneously on Pt- and Au-coated silicon substrates as porous crystals and as porous layers. By the direct reaction of metallic Ga and NH3 gas through chemical vapor deposition, intermetallic metal-Ga alloys form at the GaN-metal interface, allowing vapoursolid- solid seeding and subsequent growth of porous GaN. Currentvoltage and capacitance-voltage measurements confirm that the intermetallic seed layers prevent interface oxidation and give a highquality reduced workfunction contact that allows exceptionally low contact resistivity. Additionally, the simultaneous formation of a lower workfunction intermetallic permits ohmic electron transport to n-type GaN grown using high workfunction metals that best catalyze the formation of porous GaN layers and may be employed to seed and ohmically contact a range of III-N compounds and alloys for broadband absorption and emission. Additionally, we show how a porous GaN rectifying diode can be formed by oxidatively crystallizing Mg typically employed for p-doping GaN, as a layer formed under porous structure resulting in a high-k polycrystalline MgO dielectric.