The photolithographic patterning of ring-opening metathesis polymerization (ROMP) catalysts on oxide layers above Si(100) surfaces and the subsequent growth of both linear and crosslinked polymers of the surfaces were investigated. The dissociation of a phosphine ligand as a critical step in both the activity of the catalyst and its lifetime was also shown. It was found that if an inactivation process was performed under an inert atmosphere, the catalyst remained competent even after prolonged exposure to UV light. It was concluded that the methodology was compatible with a range of ruthenium-based olefin metathesis catalysts and monomers, that provided flexibility for the creation of polymers with desirable properties.