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Fabrication of a label-free micromechanical capacitive biosensor and integration with μPCR towards a LoC for disease diagnosis

This paper is available in a repository.
This paper is available in a repository.

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Preprint: policy unknown
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Postprint: policy unknown
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Abstract

A label-free micromechanical, capacitive type, biosensor is presented and evaluated. The sensor is integrated together with a continuous flow μPCR on a common printed circuit board (PCB) platform. In this scheme, the sensor is placed into a cavity formed on the PCB to provide the hybridization chamber, while the μPCR channel is implemented in thin photo-patternable polyimide films to maintain biocompatibility, and lies directly on top of the microheaters formed on the PCB Cu layer to provide the three thermal zones necessary for PCR.