28th Symposium on Microelectronics Technology and Devices (SBMicro 2013)
DOI: 10.1109/sbmicro.2013.6676141
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The quality of thermal contacts between a graphene flake and metal electrodes was shown to improve strongly by laser annealing. The improvement of thermal contacts to initially rough metal electrodes is attributed to local melting of the metal surface under laser heating, and increased area of real metal-graphene contact. Improvement of the thermal contacts was observed also between multi-layer graphene and silicon oxide surface, with more efficient heat transfer from graphene as compared with the graphene-metal case.