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Comparative Study of Reliability Issues in La-doped Bismuth Titante Thin films According to the Bottom Electrode Materials

Journal article published in 2008 by Jang-Sik Lee ORCID, Qx X. Jia
This paper was not found in any repository; the policy of its publisher is unknown or unclear.
This paper was not found in any repository; the policy of its publisher is unknown or unclear.

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Abstract

We have investigated the effects of bottom electrode materials on fatigue and hydrogen-induced degradation in La-doped bismuth titanate (Bi3.25La0.75Ti3O12; BLT) thin films. BLT thin films were deposited on SrRuO3 (SRO) and platinum (Pt) electrodes by pulsed laser deposition. BLT films on both electrodes showed good crystallized structures and ferroelectric properties after post-deposition annealing. Also, it was observed that there is almost no fatigue degradation in both cases. However, substantially different hydrogen-induced deg-radation behavior was observed in the case of BLT-based capacitors according to the bottom electrode materials. When Pt was used as a bottom electrode, the hydrogen-induced degradation was found to be very severe, resulting in polarization failure even at 300°C. In contrast, BLT films on SRO electrodes were highly immune to hydrogen-induced degradation.