Iron, cobalt and manganese sulphide thin films have been prepared by CVD using Fe[(C2H5)2NCS2]3, Co[(C2H5)2NCS2]3 and MnPhen[(C2H5)2NCS2]2 complex compounds (CCs) as precursors. The respective oxides were prepared by annealing the sulphide thin films in the presence of oxygen (Fe3O4, Fe2O3, Co3O4 and γ-Mn3O4) or by CVD from the same precursor in Ar/O2 atmosphere (Fe3O4, Fe2O3). Thin film structure was investigated by high-resolution Grazing-Incidence X-ray Diffraction (GIXRD) at the DESY/HASYLAB (Hamburg, Germany). Chemical composition of thin films was studied by high-resolution Laser Ionization Mass Spectrometry (LIMS) technique. Magnetic structure of iron oxides and sulphides was characterized by Conversion Electron Mössbauer Spectroscopy (CEMS).