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A glass plate driller by acid corrosion

This paper is available in a repository.
This paper is available in a repository.

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Preprint: policy unknown
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Postprint: policy unknown
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Abstract

A simple device for glass plate drilling, which is an important step in microfabrication procedures, is described. A reservoir of concentrated hydrofluoric acid with a hole in its bottom is affixed against the glass plate. Leakage is prevented by using a neoprene O-ring. A plastic pipet tip inserted in the reservoir, close to the corrosion region, provides forced convection by pressure variations inside it. A device to make 5 simultaneous holes in a plate is also presented. For a 140 µm thickness alkaline glass lamina and 1/8" O-ring, 5 holes are drilled in 20min.