The effect of metal-molecule contacts in molecular junctions is studied based on the analysis of a statisti-cally significant number of devices and a proposed multibarrier tunneling MBT model, where a metal-molecule-metal junction is divided into three individual barriers: a molecular-chain body and metal-molecule contacts on either side of molecule. Using the MBT model with the statistical analysis, we could derive and distinguish decay coefficients for contact barriers 1 , 2 , contact-dependent and contact-independent decay coefficients 0 vs body , and specific contact resistances in terms of different molecular length and different natures of metal-molecule contacts.