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American Institute of Physics, Applied Physics Letters, 6(89), p. 063104

DOI: 10.1063/1.2335668

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Large area self-assembled masking for photonic applications

Journal article published in 2006 by N. Nagy, A. E. Pap, E. Horvath, J. Volk, I. Barsony, A. Deak ORCID, Z. Horvolgyi
This paper is available in a repository.
This paper is available in a repository.

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Abstract

Ordered porous structures for photonic application were fabricated on p - and n -type silicon by means of masking against ion implantation with Langmuir-Blodgett (LB) films. LB films from Stöber silica spheres [J. Colloid Interface Sci. 26, 62 (1968)] of 350 nm diameter were applied in the boron and phosphorus ion-implantation step, thereby offering a laterally periodic doping pattern. Ordered porous silicon structures were obtained after performing an anodic etch and were then removed by alkaline etching resulting in the required two-dimensional photonic arrangement. The LB silica masks and the resulting silicon structures were studied by field emission scanning electron microscope analysis.