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Springer, Journal of Materials Research, 8(15), p. 1688-1692, 2000

DOI: 10.1557/jmr.2000.0243

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Brittle to Ductile Transition Dependence upon the Transition Pressure Value of Semiconductors in Micromachining

Journal article published in 2000 by Renato G. Jasinevicius, Paulo S. Pizani ORCID, Jaime G. Duduch
This paper is available in a repository.
This paper is available in a repository.

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Abstract

Single-point diamond turning tests were carried out in two different [001]-oriented semiconductors, InSb and Si single crystals. The analysis of the conditions in which the machining is in ductile or brittle mode indicates that the plasticity presented by semiconductor crystals during micromachining can be correlated to the value of the transition pressure. It is shown that the ductility presented by different semiconductor single crystals is inversely related to the transition pressure value of the material.