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Elsevier, Procedia Engineering, (25), p. 168-171, 2011

DOI: 10.1016/j.proeng.2011.12.042

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Thin Film Electrodes for High Temperature Surface Acoustic Wave Devices

Journal article published in 2011 by D. Richter, S. Sakharov, E. Forsén, E. Mayer, L. Reindl, H. Fritze ORCID
This paper is made freely available by the publisher.
This paper is made freely available by the publisher.

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Abstract

Wireless surface acoustic wave devices based on langasite allow sensor operation in high-temperature environments. While langasite shows piezoelectric behavior up to temperatures close to its melting point of 1470 °C, the stability of thin film electrodes for excitation of acoustic waves limits the application tem- perature. Different metal and ceramic based thin films are tested regarding their applicability as electrode materials for wireless surface acoustic wave devices at temperatures above 600 °C. The devices should with- stand temperatures of 800 °C for at least several hours. The high-temperature stability of platinum, platinum- rhodium, iridium as well as lanthanum strontium manganite (LSM) based electrodes is characterized using electrical measurements, x-ray diffraction (XRD) measurements and scanning electron microscopy (SEM) imaging. SAW devices with Ti/Pt thin film electrodes are operated up to temperatures of 800 °C. LSM/Pt films exhibit a good stability up to temperatures of 800 °C. Above 600 °C its resistance is comparable to platinum films