American Institute of Physics, Applied Physics Letters, 19(96), p. 192102
DOI: 10.1063/1.3428434
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Copper oxide ( Cu 2 O ) thin films were used to produce bottom gate p-type transparent thin-film transistors (TFTs). Cu 2 O was deposited by reactive rf magnetron sputtering at room temperature and the films exhibit a polycrystalline structure with a strongest orientation along (111) plane. The TFTs exhibit improved electrical performance such as a field-effect mobility of 3.9 cm 2/ V s and an on/off ratio of 2×102 .