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American Institute of Physics, Applied Physics Letters, 19(96), p. 192102

DOI: 10.1063/1.3428434

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Thin-film transistors based on p-type Cu2O thin films produced at room temperature

This paper is available in a repository.
This paper is available in a repository.

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Abstract

Copper oxide ( Cu 2 O ) thin films were used to produce bottom gate p-type transparent thin-film transistors (TFTs). Cu 2 O was deposited by reactive rf magnetron sputtering at room temperature and the films exhibit a polycrystalline structure with a strongest orientation along (111) plane. The TFTs exhibit improved electrical performance such as a field-effect mobility of 3.9 cm 2/ V   s and an on/off ratio of 2×102 .