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Elsevier, Chemical Physics Letters, (590), p. 131-135

DOI: 10.1016/j.cplett.2013.10.061

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On the low-temperature growth mechanism of single walled carbon nanotubes in plasma enhanced chemical vapor deposition

Journal article published in 2013 by M. Shariat, B. Shokri, E. C. Neyts ORCID
This paper is available in a repository.
This paper is available in a repository.

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Abstract

Despite significant progress in single walled carbon nanotube (SWCNT) production by plasma enhanced chemical vapor deposition (PECVD), the growth mechanism in this method is not clearly understood. We employ reactive molecular dynamics simulations to investigate how plasma-based deposition allows growth at low temperature. We first investigate the SWCNT growth mechanism at low and high temper-atures under conditions similar to thermal CVD and PECVD. We then show how ion bombardment during the nucleation stage increases the carbon solubility in the catalyst at low temperature. Finally, we dem-onstrate how moderate energy ions sputter amorphous carbon allowing for SWCNT growth at 500 K.