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American Institute of Physics, Journal of Applied Physics, 6(107), p. 063306

DOI: 10.1063/1.3343346

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Simulation of redeposition during platinum etching in argon plasmas

Journal article published in 2010 by J. Saussac, J. Margot, L. Stafford ORCID, M. Chaker
This paper was not found in any repository, but could be made available legally by the author.
This paper was not found in any repository, but could be made available legally by the author.

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Abstract

The influence of redeposition on the space and time evolution of feature profiles during platinum etching in high-density argon plasmas is examined using simulations. The simulator takes into account redeposition resulting from either direct sticking of the sputtered species on the materials walls (line-of-sight redeposition) or from sputtered species returning from plasma (indirect redeposition). Overall, the simulator successfully reproduces experimental profiles sputter etched in platinum, in particular V-shaped profiles reported in literature. From comparison between experimental and simulated profiles at very low pressure, Pt/resist sticking probability was estimated to be 0.1 and the angular spread of the sputtered atom distribution was predicted to be about ±50°. It was further found that indirect redeposition becomes crucial at higher pressure for explaining the amount of redeposited matter.