Elsevier, Sensors and Actuators B: Chemical, (111-112), p. 140-144
DOI: 10.1016/j.snb.2005.06.044
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Humidity sensors based on cluster assembled nanostructured carbon films in capacitive configuration have been fabricated and characterized. An electronic read-out system has been designed and implemented in order to measure the complex impedance of the device under operation. The sensor and read-out electronics provide a fully integrated and cost-effective system. Devices under test show a fast dynamic response and a good sensitivity compared to capacitive commercial systems. A linear response is observed for relative humidity in the range up to 70%. Hysteresis is practically absent in this range, while for higher values it is at most in the order of 2%.