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Elsevier, Microelectronics Journal, 1(35), p. 65-67

DOI: 10.1016/s0026-2692(03)00224-6

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Optical properties of silicon rich silicon oxides obtained by PECVD.

Journal article published in 2004 by B. Díaz, J. A. Rodríguez, M. Riera, A. Llobera ORCID, C. Domínguez ORCID, Joaquín Tutor-Sánchez
This paper is available in a repository.
This paper is available in a repository.

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