American Institute of Physics, Applied Physics Letters, 13(98), p. 132901
DOI: 10.1063/1.3570647
Full text: Unavailable
Electron barrier height measurements at TiN x / HfO 2 interfaces in metal-insulator-metal structures using internal photoemission of electrons reveal a significant (≈1 eV, i.e., about 1/3 of the total barrier height) influence of the opposite electrode material, i.e., Hf versus TiN x . This effect is suggested to be caused by oxygen scavenging from HfO 2 by the opposite Hf electrode resulting in generation of positive charges in the oxide above the metal electrode surfaces. Such a considerable interface dipole component demonstrates a principle that may be used to tune the barrier.