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American Institute of Physics, Applied Physics Letters, 13(98), p. 132901

DOI: 10.1063/1.3570647

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TiN x / HfO 2 interface dipole induced by oxygen scavenging

This paper was not found in any repository, but could be made available legally by the author.
This paper was not found in any repository, but could be made available legally by the author.

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Abstract

Electron barrier height measurements at TiN x / HfO 2 interfaces in metal-insulator-metal structures using internal photoemission of electrons reveal a significant (≈1 eV, i.e., about 1/3 of the total barrier height) influence of the opposite electrode material, i.e., Hf versus TiN x . This effect is suggested to be caused by oxygen scavenging from HfO 2 by the opposite Hf electrode resulting in generation of positive charges in the oxide above the metal electrode surfaces. Such a considerable interface dipole component demonstrates a principle that may be used to tune the barrier.