Published in
Elsevier, Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, (320), p. 6-11, 2014
DOI: 10.1016/j.nimb.2013.11.020
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Investigation of deep implanted carbon and oxygen channeling profiles in [1 1 0] silicon, using d-NRA and SEM
Journal article published in 2014 by
V. Paneta,
M. Erich,
S. Fazinić,
M. Kokkoris 
,
I. Kopsalis,
S. Petrović,
T. Tadić
,
I. Kopsalis,
S. Petrović,
T. Tadić
This paper is available in a repository.
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