Published in

Optica, Optics Express, 4(20), p. 4291, 2012

DOI: 10.1364/oe.20.004291

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Fabrication of three-dimensional microfluidic channels inside glass using nanosecond laser direct writing

This paper is made freely available by the publisher.
This paper is made freely available by the publisher.

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Abstract

We show that fabrication of three-dimensional microfluidic channels embedded in glass can be achieved by using a Q-switched, frequency-doubled Nd:YAG laser. The processing mainly consists of two steps: (1) formation of hollow microfluidic channels in porous glass immersed in Rhodamine 6G dissolved in water by nanosecond laser ablation; and (2) postannealing of the fabricated porous glass sample at 1120 °C for consolidation of the sample. In particular, a bilayer microfluidic structure is created in glass substrate using this technique for showcasing its capability of three-dimensional structuring.