In this paper we fabricated 13440 microscale via hole structure devices using different length of alkanethiol self-assembled monolayers and characterized their electronic transport properties. Statistically averaged transport parameters such as current density, transport barrier height, effective electron mass, and transport decay coefficient were obtained from the great number of these devices. The yield of working microdevices was found as 1.5%. Temperature variable current-voltage characteristics for alkanethiol micro-via hole devices showed typical tunneling behavior when properly fabricated.