article under the CC BY-NC-ND license (http://creativecommons.org/licenses/by-nc-nd/3.0/). Peer-review under responsibility of the scientific committee of Eurosensors 2014 Abstract An experimental approach for the detection of harmful gases in presence of humidity has been applied for gas sensors based on p-type Cu-Al-Oxide thin films. The impact of deposition conditions on the surface, morphology and sensing properties of the semiconducting oxide thin films are investigated. Cu-Al-Oxide thin film with higher resistance can be applied as p-type resistive gas sensor for the detection of pollutant gases. Thin films were characterized by X-Ray Diffraction, scanning electron microscope, and Raman spectroscopy. We observed that inert atmosphere and deposition temperature play the important role to affect the structural and surface morphology of Cu-Al-Oxide thin films. Sensitivity of nanostructured thin films towards reducing and oxidizing gas are studied as a function of gas concentration and operating temperature.