The process of hydrogen reduction of 32S from 32SF6 via RF capacitive plasma discharge was investigated at low pressure. The main products of the plasma-chemical reactions were identified by mass-spectrometry and IR-spectroscopy techniques. The dependence of 32S yield on energy contribution was studied at two molar ratios of the initial substances H2: 32SF6. The optimum conditions for the process of plasma-chemical reduction were determined in terms of the maximum conversion degree of 32SF6 into 32S which attained 70%.