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Elsevier, Microelectronic Engineering, (122), p. 13-19, 2014

DOI: 10.1016/j.mee.2014.03.010

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X-ray source downscaling enabled by combining microfabricated electrodes with carbon nanotube cold electron emitters

This paper is available in a repository.
This paper is available in a repository.

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Abstract

Developments in the field of X-ray imaging are made possible by new source design concepts that lead to unseen features such as fast switching and reduced imaging time which enable, for example, for static computed tomography. In this work we describe the fabrication, assembly, and testing of micro-fabricated electrodes and carbon nanotube cold cathodes, based on a new design concept, to be packaged in a miniaturized X-ray source. The source design concept was validated. X-rays were generated with a current 4 µA and an acceleration voltage of 3.1 kV when the component were assembled and operated in a high vacuum chamber at <10-6 mbar. We comment on the expected performance of the final X-ray source as well as the individual components’ limitations.