This study deals with parametric optimization of cantilever based MEMS devices for the fabrication of toluene gas sensor. Silicon (Si), Silicon Nitride (Si 3 N 4), Silicon Carbide (SiC) and Tungsten Carbide (WC) were compared to adjudge the best possible cantilever material. A known polymer coating which shows selectivity towards toluene was incorporated onto each of these cantilevers. Parameters such as deflection and resonant frequency shifts change as the concentration of analyte changes on the cantilever substrate. A comparative study was done keeping in mind the need for the best possible detection mechanism. Furthermore, FEM based simulations were carried out once the best cantilever material was known.