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Trans Tech Publications, Journal of Metastable and Nanocrystalline Materials, (20-21), p. 195-200, 2004

DOI: 10.4028/www.scientific.net/jmnm.20-21.195

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Characterization of Diamond Replicas Microfabricated Using Silicon Molds

Journal article published in 2004 by D. R. Martins, M. C. Salvadori ORCID, R. D. Mansano, P. Verdonck
This paper is available in a repository.
This paper is available in a repository.

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Abstract

Diamond replicas, concerning to the fidelity, were quantitatively evaluated in this work. We analyzed the dimensions and morphology of the silicon molds and diamond replicas by atomic force microscopy. The micrometric and nanometric characterization were performed for different substrate pretreatments.