For measurements of the neutron-induced fission cross section of 242Pu, large-area (42cm2) 242Pu targets were prepared onTi-coated Si wafers by means of constant current density molecular plating. Radiochemical separations were performed prior tothe platings. Quantitative deposition yields (>95%) were determined for all targets by means of alpha-particles pectroscopy. Layer densities in the range of 100–150 μg/cm2 were obtained. The homogeneity of the targets was studied by radiographic imaging. A comparative study between the quality of the layers produced on the Ti-coated Si wafers and the quality of layers grown on normal Ti foils was carried out by applying scanning electronmicroscopy and energy dispersive X-ray spectroscopy. Ti-coated Si wafers resulted clearly superior to Ti foils in the production of homogeneous 242Pu layers with minimum defectivity. ; JRC.E.3-Materials research