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Elsevier, Sensors and Actuators A: Physical, 1-2(99), p. 119-124

DOI: 10.1016/s0924-4247(01)00901-3

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Micromachining of a silicon multichannel microprobe for neural electrical activity recording

This paper is available in a repository.
This paper is available in a repository.

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Abstract

The cellular potential recording permits the investigation of the central nervous activity. The paper presents the design and manufacturing steps of an eight-channel microprobe for recording the electrical activity of neural cells and tissues integrated on the same chip with the electronics. The specific fabrication processes of the integrated microprobe are presented. An implantable neural microprobe is developed to enable the correlation between electrical activity in the human nervous system and externally psycho-electrical stimuli.