Published in
Institute of Electrical and Electronics Engineers, Journal of Microelectromechanical Systems, 2(8), p. 129-134, 1999
DOI: 10.1109/84.767108
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Micromachined low-loss microwave switches
Journal article published in 1999 by
Z. Jamie Yao,
Shea Chen,
Susan Eshelman,
David Denniston,
Charles Goldsmith
This paper is available in a repository.
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