Published in

Elsevier, Thin Solid Films, (469-470), p. 201-205

DOI: 10.1016/j.tsf.2004.08.097

Links

Tools

Export citation

Search in Google Scholar

Measurement of thin film elastic constants by X-ray diffraction

Journal article published in 2004 by D. Faurie ORCID, P.-O. Renault, E. Le Bourhis, P. Villain, Ph Goudeau, F. Badawi
This paper is available in a repository.
This paper is available in a repository.

Full text: Download

Green circle
Preprint: archiving allowed
Red circle
Postprint: archiving forbidden
Red circle
Published version: archiving forbidden
Data provided by SHERPA/RoMEO

Abstract

Uniaxial tensile testing on thin film/kapton composite specimens has been used to determine thin film elastic constants by X-ray diffraction. The method has been applied to a 140-nm-thick tungsten film which is elastically isotropic and to a 560-nm-thick gold film which is elastically anisotropic. The experimental ɛ-vs.-sin2ψ curves are linear for the polycrystalline isotropic tungsten film and nonlinear for the textured gold film. It is shown that a linear analysis of ɛ-vs.-sin2ψ curves allows the direct determination of elastic constants of the tungsten film, while the use of the crystallite-group method is proposed to analyse the nonlinear behaviour of ɛ-vs.-sin2ψ curves of the fibre-textured gold film.