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American Institute of Physics, Applied Physics Letters, 21(90), p. 213506

DOI: 10.1063/1.2742589

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Surface acoustic wave device on AlGaN/GaN heterostructure using two-dimensional electron gas interdigital transducers

Journal article published in 2007 by King-Yuen Wong, Wilson Tang, Kei May Lau, Kevin J. Chen ORCID
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This paper is available in a repository.

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Abstract

Surface acoustic wave (SAW) devices using two-dimensional electron gas (2DEG) as interdigital transducers (IDTs) on Al Ga N / Ga N heterostructure has been demonstrated using a planar isolation technique based on the fluoride-based ( C F 4) plasma treatment technique. The rf characteristics of the SAW filters with planar 2DEG IDTs are compared with SAW devices that are made of metal IDTs or hybrid metal/2DEG IDTs.