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Elsevier, Nano Today, 5(5), p. 435-448

DOI: 10.1016/j.nantod.2010.08.007

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Designable 3D nanofabrication by femtosecond laser direct writing

Journal article published in 2010 by Yong-Lai Zhang, Qi-Dai Chen, Hong Xia, Hong-Bo Sun ORCID
This paper is available in a repository.
This paper is available in a repository.

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Abstract

Femtosecond laser direct writing (FsLDW) has been established as a nano-enabler to solve problems that are otherwise not possible in diversified scientific and industrial fields, because of its unique three-dimensional processing capability, arbitrary-shape designability, and high fabricating accuracy up to tens of nanometers, far beyond the optical diffraction limit. We briefly review the underlying mechanisms for achievement of the superhigh fabrication spatial resolution and surface smoothness, and then discuss the rule and photochemical strategies that are currently exploited for FsLDW. Finally, applications of the delicate nanoprototyping approach in microelectronics, micromechanics, microoptics and microfluidics are introduced. (C) 2010 Elsevier Ltd. All rights reserved.