Published in

Laser Diodes, Optoelectronic Devices, and Heterogenous Integration

DOI: 10.1117/12.468250

Institute of Electrical and Electronics Engineers, Journal of Lightwave Technology, 1(21), p. 228-235, 2003

DOI: 10.1109/jlt.2003.808608

Links

Tools

Export citation

Search in Google Scholar

Design, fabrication, and testing of an integrated Si-based light modulator

This paper is available in a repository.
This paper is available in a repository.

Full text: Download

Red circle
Preprint: archiving forbidden
Green circle
Postprint: archiving allowed
Green circle
Published version: archiving allowed
Data provided by SHERPA/RoMEO

Abstract

We have fabricated and characterized a novel Si-based light modulator working at the standard communication wavelength of 1.5 μm. It consists of a three-terminal bipolar mode field effect transistor integrated with a silicon rib waveguide on epitaxial Si wafers. The modulator optical channel is embodied within its vertical electrical channel. Light modulation is achieved moving a plasma of carriers inside and outside the optical channel by properly biasing the control electrode. The carriers produce an increase of the Si absorption coefficient. The devices have been fabricated using clean-room processing. Detailed electrical characterization and device simulations confirm that strong conductivity modulation and plasma formation in the channel are achieved. The plasma distribution in the device under different bias conditions has been directly derived from emission microscopy analyses. The device performances in terms of modulation depth will be presented.