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Published in

Elsevier, Procedia Engineering, (5), p. 1494-1497, 2010

DOI: 10.1016/j.proeng.2010.09.400

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Quality factor enhancement in AlN-actuated MEMS by velocity feedback loop

This paper is made freely available by the publisher.
This paper is made freely available by the publisher.

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Postprint: archiving allowed
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Data provided by SHERPA/RoMEO

Abstract

This report details electronic feedback techniques which allow precise control of the quality factor Q of a two-port piezoelectric micromechanical resonator device, independent of the ambient operating conditions. A circuit including a microbridge resonator has been implemented to increase the quality factor of the device. Q amplification has been validated by both time domain and frequency spectrum measurements. In addition to electrical measurements, a mechanical characterization of the resonator was carried out by means of a laser vibrometer, which confirmed the increase in Q factor due to the electronic feedback. Enhancement factors of almost two orders of magnitude were achieved, demonstrating an effective way to improve the performance of piezoelectric MEMS by a suitable electronic design.