American Institute of Physics, AIP Conference Proceedings
DOI: 10.1063/1.1622537
Full text: Download
We review recent advances in aberration-corrected scanning transmission electron microscopy that allow sub-A˚ngstrom beams to be used for imaging and spectroscopy, with enormous improvement in sensitivity for single atom detection and the investigation of interfacial electronic structure. Comparison is made between the electronic and structural width of gate oxides, with interpretation through first-principles theory. Future developments are discussed.