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Elsevier, Surface and Coatings Technology, 20-21(200), p. 5902-5907

DOI: 10.1016/j.surfcoat.2005.09.003

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Microstructural evolution of allylamine polymerized plasma films

This paper is available in a repository.
This paper is available in a repository.

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Abstract

The present paper deals with the characterization of plasma polymerized allylamine films. The films were characterized using a large panel of techniques such as Fourier transformation infrared spectroscopy, X-ray photoemission spectroscopy and ellipsometry. The film microstructure was investigated as a function of the deposition power while other process parameters (gas mixture flow, pressure) were kept constant. The microstructure shows a strong dependence on the deposition power. A power transition has been identified outlining two deposition modes in agreement with a growth model developed for carbon nitride thin films. Conditions of deposition closed to this transition provide a film microstructure interesting for absorption and adhesion of biomolecules i.e. high NH2 content, high porosity and high deposition rate.