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Trans Tech Publications, Materials Science Forum, (389-393), p. 343-346

DOI: 10.4028/www.scientific.net/msf.389-393.343

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Improved SiCOI Structures Elaborated by Heteroepitaxy of 3C-SiC on SOI

This paper was not found in any repository, but could be made available legally by the author.
This paper was not found in any repository, but could be made available legally by the author.

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Abstract

International audience