Springer Verlag, Journal of Contemporary Physics (Armenian Academy of Sciences), 4(48), p. 176-183
DOI: 10.3103/s1068337213040063
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Thin film gas sensors made of nanocomposite MWCNT·SnO2(1:66), semiconductor compound WO3·SnO2(1:9), and also multicomponent structure MWCNT·SnO2(1:66)/WO3·SnO2(1:9) have been fabricated by high-frequency magnetron sputtering and electron-beam deposition methods. Sensitivity of the prepared sensors to influence of gases, such as hydrogen, methane, butane, and also ethanol vapors, was investigated. Sensors made of MWCNT·SnO2(1:66) and WO3·SnO2(1:9) show appreciable sensitivity to hydrogen and alcohol vapors already at working body temperature 100–150°C. Sensors made of MWCNT·SnO2(1:66)·WO3·SnO2(1:9) can be used for detection of low concentrations of hydrogen and ethanol vapors; besides, monotonous increase in the structure sensitivity with increase in content of the alcohol vapors allows one to apply these sensors also for fast detection of concentration of these vapors in air.