Elsevier, Journal of Crystal Growth, 1(353), p. 108-114
DOI: 10.1016/j.jcrysgro.2012.05.004
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Our study of samples grown in different metalorganic chemical vapor deposition reactors and with different growth conditions reveals that V-pits are always present in (InxAl1−x)N films whatever the layer thickness and the InN content. V-pits are empty inverted pyramids terminating threading dislocations. InN-rich triangular regions are present around the threading dislocations terminated by pits with a hexagonal 6-fold symmetry distribution in {11−20} planes. The nature of the facets of the V-pits depends on the growth conditions: pits with either {11−2l}, l being between 1 and 3, or {1−101} facets have been observed. Moreover, the nature of the threading dislocations terminated by pits also depends on the growth conditions. Our observations suggest that with a high V/III ratio only edge a+c-type dislocations are terminated by pits whereas with a low V/III ratio both edge a-type and mixed a+c-type dislocations are terminated by pits.