Published in

Advanced Optical and Mechanical Technologies in Telescopes and Instrumentation

DOI: 10.1117/12.787525

Links

Tools

Export citation

Search in Google Scholar

A new factory for silicon grisms

Journal article published in 2008 by F. Vitali ORCID, V. Foglietti ORCID, E. Cianci, D. Lorenzetti ORCID
This paper was not found in any repository, but could be made available legally by the author.
This paper was not found in any repository, but could be made available legally by the author.

Full text: Unavailable

Red circle
Preprint: archiving forbidden
Green circle
Postprint: archiving allowed
Green circle
Published version: archiving allowed
Data provided by SHERPA/RoMEO

Abstract

We present the results of our project aimed to design and construct silicon grisms. The fabrication of such devices is a complex and critical process involving litho masking, anisotropic etching and direct bonding techniques. After the successful fabrication of the silicon grating, we have optimized the bonding of the grating onto the hypotenuse of a silicon prism to get the final prototype. After some critical phases during the experimentation a silicon grism has been eventually fabricated with 363.6 grooves/mm and 14 degrees of blaze angle. The results of the cryo-optical laboratory tests are reported, along with a general description of the adopted technological process. The positive results allows us to offer to the international community a new capability in building such devices.