ABSTRACTSubstituted β-diketonate complexes of barium have limited volatility even at reduced pressures. The addition of nitrogen Lewis bases to the CVD carrier gas allows barium β-diketonates, even those with no reported volatility, to be transported in the vapor phase at temperatures as low as 70°C (atmospheric pressure) with no decomposition. No increase in volatility is observed, however, for barium carboxylate complexes.