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63rd Device Research Conference Digest, 2005. DRC '05.

DOI: 10.1109/drc.2005.1553094

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Increased reliability of a-Si TFT's deposited on clear plastic substrates at high temperatures

Proceedings article published in 1970 by K. Long, A. Kattamis, I.-C. Cheng ORCID, H. Gleskova, S. Wagner, J. C. Sturm
This paper is available in a repository.
This paper is available in a repository.

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Abstract

In this paper, the authors have developed an a-Si TFT process on clear plastic substrates which allows direct transfer of industry a-Si TFT process on glass to plastic substrate for flexible electronics applications. The high temperature process increases the reliability of the a-Si TFT's, which is critical for OLED's where one TFT must operate in a DC condition