ECS Meeting Abstracts, 27(MA2011-02), p. 1906-1906, 2011
DOI: 10.1149/ma2011-02/27/1906
The Electrochemical Society, ECS Transactions, 3(33), p. 165-169, 2010
DOI: 10.1149/1.3481603
Full text: Download
The synthesis of LaxAl2-xO3 films using ultrasonic spray pyrolysis technique are reported. The films were deposited from a spraying solution of aluminum acetylacetonate (Al(acac)3) and lanthanum(III) nitrate hexahydrate La(NO3)36H2O dissolved in N,N-Dimethylformamide on (100) Si substrates. The substrate temperature during was in the range 500-600°C. The mean roughness was lower than 18 Aå in all cases. The films were amorphous in all cases. The optical band gap was 5.42 eV and the refractive index was in the 1.64-1.72 range depending of the deposition conditions.