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ECS Meeting Abstracts, 27(MA2011-02), p. 1906-1906, 2011

DOI: 10.1149/ma2011-02/27/1906

The Electrochemical Society, ECS Transactions, 3(33), p. 165-169, 2010

DOI: 10.1149/1.3481603

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Synthesis of LaxAl2-xO3 Films Using Ultrasonic Spray Pyrolysis Technique

This paper is made freely available by the publisher.
This paper is made freely available by the publisher.

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Abstract

The synthesis of LaxAl2-xO3 films using ultrasonic spray pyrolysis technique are reported. The films were deposited from a spraying solution of aluminum acetylacetonate (Al(acac)3) and lanthanum(III) nitrate hexahydrate La(NO3)36H2O dissolved in N,N-Dimethylformamide on (100) Si substrates. The substrate temperature during was in the range 500-600°C. The mean roughness was lower than 18 Aå in all cases. The films were amorphous in all cases. The optical band gap was 5.42 eV and the refractive index was in the 1.64-1.72 range depending of the deposition conditions.