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Digests of the 2010 14th Biennial IEEE Conference on Electromagnetic Field Computation

DOI: 10.1109/cefc.2010.5481848

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Semi-analytical Magnetic-Structural coupling with contact analysis for MEMS/NEMS

Journal article published in 2010 by Phuong Pham Quang, Benoît Delinchant ORCID, Jean-Louis Coulomb, B. du Peloux, Bertrand Du Peloux
This paper is made freely available by the publisher.
This paper is made freely available by the publisher.

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Abstract

This paper presents a methodology and a tool for magnetic and mechanical deformation coupling using numerical and analytical modeling. An analytical magnetic model using Coulombian approach is used and coupled with a mechanical deformation model for a cantilever beam to evaluate contact size and contact force. Such a coupling is not available using numerical solution. This paper details the deformation and contact analysis, which is validated by finite element simulation and also details the coupling approach. Such a modeling is dedicated to an optimization process of magnetic MEMS/NEMS in general and to magnetic nano switch in particular.