Springer Verlag, Microsystem Technologies, 5-6(13), p. 475-481
DOI: 10.1007/s00542-006-0184-1
Full text: Unavailable
Manufacturing moulds in non-metallic tooling materials using non conventional structuring techniques is explored for rapid and/or alternative tooling for hot embossing of polymers. Some challenges and advantages of producing embossing tools by deep reactive ion etching (DRIE) in silicon and/or replica-casting in poly(dimethylsiloxane) (PDMS) and utilizing them in the replication process are highlighted.