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Simulation and Characterization of High Q Microresonators Fabricated by UV – LIGA

Proceedings article published in 2001 by Skandar Basrour, M. de Labachelerie, J.-R. Coudevylle ORCID, H. Majjad
This paper was not found in any repository; the policy of its publisher is unknown or unclear.
This paper was not found in any repository; the policy of its publisher is unknown or unclear.

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Abstract

Vol. 1, Chapter 7: Applications: MEMS, Sensors ; International audience ; This paper is devoted to a study on a new metallic microresonator realized by UV-LIGA technique. This device is excited electrostatically and takes advantage of the contour modes or Lamé-modes of the structure. Design methods of such device are presented and validated by the use of Finite Element Analysis (FEA). Details on the fabrication process are also exposed. The vibration modes are detected with an optical interferometer and preliminary results are presented. A comparison between experiments and numerical predictions are finally discussed.