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Transducers ’01 Eurosensors XV, p. 300-303

DOI: 10.1007/978-3-642-59497-7_71

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Modeling and characterization of Lame-mode microresonators realized by UV-LIGA

This paper was not found in any repository, but could be made available legally by the author.
This paper was not found in any repository, but could be made available legally by the author.

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Abstract

We report in this paper the study of a new metallic microresonator realized by UV-LIGA technique. This kind of device is excited electrostatically and takes advantage of the contour modes or Lame-modes of the structure. Design methods of such device are presented and simulated with a Finite Element Program. Details on the microfabrication process are also presented. The vibration modes are detected with an optical bench setup and preliminary electrical results are presented. A comparison between experiments and numerical predictions are finally discussed.