Transducers ’01 Eurosensors XV, p. 300-303
DOI: 10.1007/978-3-642-59497-7_71
Full text: Unavailable
We report in this paper the study of a new metallic microresonator realized by UV-LIGA technique. This kind of device is excited electrostatically and takes advantage of the contour modes or Lame-modes of the structure. Design methods of such device are presented and simulated with a Finite Element Program. Details on the microfabrication process are also presented. The vibration modes are detected with an optical bench setup and preliminary electrical results are presented. A comparison between experiments and numerical predictions are finally discussed.